Use of C2F6 Gas：

1.Hexafluoroethane can be used with trifluoromethane as refrigerant R508A.

2.Hexafluoroethane, used in industry, used as insulating gas, plasma etching agent, high dielectric strength cooling agent

3.Etching technology is commonly used in semiconductor production.

4.For selective etching of metal silicides and metal oxides with respect to their metal substrates,Also used for etching silica on silicon.