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High pruity gas

Halocarbon 14 (Tetrafluoromethane)
Description

Halocarbon 14 (Tetrafluoromethane) (CF4) is a colorless, nontoxic, nonflammable, noncorrosive gas with 
a slight ether-like odor. Halocarbon 14 is normally compressed and shipped at high pressure.


Quick Details

DOT NameTetrafluoromethaneAppearance: colorlessFlamrange:nonflammable
Hazard Class2.2Corrosive:noncorrosive Grade:99.99%-99.999% 
DOT No.UN 1982 Toxic:Non-toxic 
DOT LabelGreen, NonFlammable Gas
CAS No.75730

Applications

Halocarbon 14 is combined with Oxygen to etch Polysilicon, Silicon Dioxide, Silicon Nitrite, some Metals and 
Metal Silicides. It can be combined with Halocarbon 116 or used alone to clean wafers and chambers. 

Specifications

 Grade 4.0Grade 4.5Grade 5.0
Purity99.99%99.999%99.999%
Oxygen< 20 ppm< 5 ppm< 1 ppm
Moisture< 5 ppm< 5 ppm< 2 ppm
Nitrogen< 60 ppm< 30 ppm< 5 ppm
Halocarbon 116  < 1 ppm
Other Halocarbons< 5 ppm< 5 ppm 
Carbon Dioxide< 5 ppm< 1 ppm< 0.5 ppm
Carbon Monoxide< 5 ppm< 1 ppm< 0.5 ppm
Sulfur Hexafluoride   
Hydrocarbons < 1 ppm 
Acidity (HF)< 0.1 ppm< 0.1 ppm< 0.1 ppm

Package

Cylinder SizesFill Weight (kgs)
44L/Size 20031.82kgs


     Hot Keywords:   Tetrafluoromethane (CF4)   Sulfur hexafluoride (SF6)   Hydrogen Chloride (HCL)   Helium Gas (He)   Cylindcer   ISO Tank   Gas regulator
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WUHAN NEWRADAR SPECIAL GAS CO.,LTD Tel:86-27-82653381 E-mail: vicky@nrdgas.com MSN:vickyy8930@hotmail.com
Address: Wuhan City, Hubei Province, China Jiang Road , Special No.1 Building, Room 803