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Tel: 86-27-82653381
Fax: 86-27-82629459
Mobile Phone: 86-13667126861
E-mail: vicky@nrdgas.com
SKP: vickyy8930
MSN: vickyy8930@hotmail.com
Address: Room 803, Chuangye Building,
Special No. 1, Jiangda Road, Jiang'an ,
Wuhan , Hubei China (Mainland)
Zip: 430000
High pruity gas

Sulfur Hexafluoride(SF6)

We provide highest quality SF6 gas in a variety of purities that can meet different demands for global
customers. Newradargas engineers its SF6 into a unique formula by our proprietary chemical and
manufacturing process, which ensure the our SF6 exceeds the industry standards.

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Quick Details

DOT Name:Sulfur Hexafluoride            

DOT No:UN 1080                             

DOT Label:Green, Non–Flammable Gas        

CAS No:2551-62-4

Appearance:colorless

Flam range:nonflammable

Hazard Class:2.2

Odor:odorless

Organic: inorganic

Toxic:Non-toxic 

Grade:99.9%-99.999%


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(For More Details About Our SF6 Technical Data and Shipment,Please Call Our Online Customer Service.)

Specification

SF6:≥99.995 %(m/m)

AIR:≤0.003 %(m/m)

CF4:≤0.001%(m/m)

H2O:2.0ppm(m/m)

Acidity(express as HF):0.1ppm(m/m)   

Hydrolysable Fluoride(express as HF):≤0.2ppm(m/m)

Mineral oil:≤2.0ppm(m/m)

Biological noxious test:Non-toxic

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Application

Sulfur Hexafluoride is used for plasma etching prior to chemical vapor deposition (VCD). These
processes include Oxide etching, Nitride etching and wafer cleaning. Sulfur Hexafluoride gas, which
is itself inert,disassociates in the presence of an RF field to form reactive fluorine ions. These highly
reactive ions are excellent for etching tungsten and tungsten silicide films.

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Package

Cylinder Sizes

Fill Weight (lbs)

44L/Size 200

115.0

16L/Size 80

35.0

7L/Size 35

18.0

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Caution

Cylinder must be stored and used in an upright, secured position in a well-ventilated or monitored area.

Always use in accordance with the Material Safety Data Sheet (MSDS)

Always follow local fire code requirements when storing gas cylinders.

Bodily contact with escaping gas may cause frostbite

Major Hazards: Suffocation; High pressure, compressed gas


 

We welcome customers, business associations and friends from all parts of the world to contact us and seek cooperation for mutual benefits.


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WUHAN NEWRADAR SPECIAL GAS CO.,LTD Tel:86-27-82653381 E-mail: vicky@nrdgas.com MSN:vickyy8930@hotmail.com
Address: Wuhan City, Hubei Province, China Jiang Road , Special No.1 Building, Room 803