Product nameTrifluoromethane CHF3 R23
Grade Standard: Electron Grade, Industrial GradeMSDS
|Other names :||Trifluoromethane|
|Formula weight :||70.01|
Where to buy trifluoromethane CHF3 R23 ?
If you’re interested in purchasing trifluoromethane from a trusted specialty gas supplier, use our email button to contact us Newradar Gas.We can also provide you with additional information via our website or message board.
|Package Size：||12Ltr Cylinder||47Ltr Cylinder|
|Valve：||QF-2 / CGA 580|
CHF3 is used in the semiconductor industry in plasma etching of silicon oxide and silicon nitride. Known as R-23 or HFC-23, it was also a useful refrigerant, sometimes as a replacement for chlorotrifluoromethane (CFC-13) and is a byproduct of its manufacture.
When used as a fire suppressant, the fluoroform carries the DuPont trade name, FE-13. CHF3 is recommended for this application because of its low toxicity, its low reactivity, and its high density. HFC-23 has been used in the past as a replacement for Halon 1301 in fire suppression systems as a total flooding gaseous fire suppression agent.