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Hexafluoroethane C2F6 R116

Product nameHexafluoroethane C2F6 R116



Dot Class:2.2

Other Names:Hexafluoroethane gas

CAS NO:76-16-4

Grade Standard:Industrial Grade,Medicine Grade,Electron Grade


Hexafluoroethane, also known as perfluoroethane, is a product of all six hydrogen atoms in ethane being replaced by fluorine atoms. It is a halogenated hydrocarbon (chemical formula: C2F6) and is also a hydrocarbon compound ethane. The corresponding perfluorinated compound is a non-flammable gas, hardly soluble in water, and slightly soluble in alcohol.

 Other names : Hexafluoroethane
 MF:  C2F6
 Formula weight :  138.01


 CAS No: 76-16-4
 EINECS No: 200-939-8
 UN No: UN2193
 Purity:  99.9%-99.999%
 Appearance:  Colorless

 Package Size: 47Ltr Cylinder
 Filling Content/Cyl: 43.2KGS
 QTY Loaded in 20'Container: 200Cyls
 Value: CGA660

Hexafluoroethane can be used with trifluoromethane as refrigerant R508A.

Hexafluoroethane, used in industry, used as insulating gas, plasma etching agent, high dielectric strength cooling agent

Etching technology is commonly used in semiconductor production.

For selective etching of metal silicides and metal oxides with respect to their metal substrates,Also used for etching silica on silicon.


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