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Electron mixture gas


Electronic industry gas system is called electronic gas. In the large scale integrated circuit (LSI), very large scale integrated circuit (VLSI), semiconductor and electronic devices in the process of production and processing, electron gas is mainly used in the gas phase epitaxial growth, chemical vapor deposition, doped impurity (diffusion), etching, ion implantation, sputtering and annealing, system pressure, clean purging and suction cover, oxidation, reduction, etc. Some of them are directly used as semiconductor sources, such as silicon source, boron source, phosphorus source and CVD source.


Oxygen in Tetrafluoromethane

 4% O2/CF4

8% O2/CF4

17.5% O2/CF4

Standard Valve Outlet CGA580

Other DISS CGA connections are avaliable upon request.

Phosphine in Argon

 

1.0% PH3/Ar

2.0% PH3/Ar

5.0% PH3/Ar

10.0% PH3/Ar

15.0% PH3/Ar

Standard Valve Outlet CGA350

Manual and pneumatic DISS CGA connections are avaliable upon request.

Phosphine in Helium

 

1.0% PH3/He

2.0% PH3/He

10.0% PH3/He

Standard Valve Outlet CGA350

Manual and pneumatic DISS CGA connections are avaliable upon request.

Phosphine in Hydrogen

 

1.0% PH3/H2

5.0% PH3/H2

10.0% PH3/H2

15.0% PH3/H2

Standard Valve Outlet CGA350

Manual and pneumatic DISS CGA connections are avaliable upon request.

Phosphine in Nitrogen

 

1.0% PH3/N2

2.0% PH3/N2

3.0% PH3/N2

4.0% PH3/N2

5.0% PH3/N2

10.0% PH3/N2

15.0% PH3/N2

Standard Valve Outlet CGA350

Manual and pneumatic DISS CGA connections are avaliable upon request.

Silane in Argon

 

1.0% SiH4/Ar

2.0% SiH4/Ar

3.0% SiH4/Ar

4.0% SiH4/Ar

5.0% SiH4/Ar

10.0% SiH4/Ar

Standard Valve Outlet CGA350

Manual and pneumatic DISS CGA connections are avaliable upon request.

Silane in Hydrogen

 

1.0% SiH4/H2

2.0% SiH4/H2

3.0% SiH4/H2

4.0% SiH4/H2

5.0% SiH4/H2

10.0% SiH4/H2

Standard Valve Outlet CGA350

Manual and pneumatic DISS CGA connections are avaliable upon request.

Silane in Nitrogen

 

1.0% SiH4/N2

2.0% SiH4/N2

3.0% SiH4/N2

4.0% SiH4/H2

5.0% SiH4/N2

10.0% SiH4/N2

20.0% SiH4/N2

Standard Valve Outlet CGA350

Manual and pneumatic DISS CGA connections are avaliable upon request.


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