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Single frequency excimer laser

The so-called single-frequency excimer laser is a pulsed gas laser, which is activated when a current passes through it, releasing a wavelength of monochromatic light. A gas is a mixture of an inert gas and a halogen. The activated inert gas and a halogen form a halide. The word Excimer comes from the meaning of an Excimer molecule, which is an Excimer Dimer.

Currently, the single frequency excimer laser is mainly used in the following ways: argon-fluorine (ArF) excimer laser has a wavelength of 193nm; The wavelength of krypton fluoride (KrF) excimer laser is 248nm. The wavelength of xenon - chlorine (XeCl) excimer laser is 308nm. Xenon fluorine (XeF) excimer laser wavelength of 351nm. The single-frequency excimer laser is a continuous pulsed gas laser. The wavelength of the light emitted is in the ultraviolet range, the pulse width is 10 ~ 30 ns, the frequency is 0 ~ 35 Hz, and the wavelength of the four single-frequency excimer lasers is gas specific.

Currently, the widely used ArF193 and Xecl308 excimer laser has been widely used in the medical field and photoelectric profession. The gas is analyzed scientifically to remove all harmful impurities from the rare gas. Gas analysis proved that the presence of these impurities would affect the excimer laser to achieve the best performance. Gasses sells these high quality rare and balanced gases worldwide to meet the needs of all excimer lasers. The world's largest producer of excimer laser gases has demonstrated that any gas or mixture of gases associated with any laser can have a significant impact on the function of the laser, including:


A pulsating energy

B output power

C service life of filling gas once

D stability (one pulse to another)

In order to optimize the laser's function, the team of gas chemists carefully analyzed each gas compound and specifically monitored the impurities that were harmful to the laser's function to ensure the quality of the product. These analyses focus primarily on (but are not limited to) water, oxygen, hydrocarbons, and all other unwanted impurities.

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